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Semi-Conductors

Precision gearboxes for wafer handling robots, process equipment and automated material handling systems.
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Built-In Precision

Wafer Handling

Wafer Handling

Wafer handling robots and material handling systems move wafers between process steps. Strain wave gears give each joint zero backlash in a compact size.

  • Wafer handling robot joints
  • Zero backlash on strain wave gears
  • Gear Sets that build into your own housing
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Process Tools

Process Tools

Process tools rotate and index parts with precise, repeatable motion. RD2 gearheads and the hollow shaft RV-C Series add RV rigidity and load support.

  • Rotary and indexing axes in process tools
  • Backlash less than 1 arc-min on RDS models
  • Fittings for all major servo motors
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Repeatability

Repeatability

A wafer handler must return to the same position on every cycle. Strain wave gears combine zero backlash with excellent repeat accuracy, and RV-based RDS gearheads hold backlash and lost motion below 1 arc-min.

Low breakaway torque in RV gears also supports small, smooth correction moves at low speed.

Tight Spaces

Tight Spaces

Equipment frames leave little room for drives. Strain Wave Gear Sets offer small dimensions and low weight and integrate fully into your own design, while right-angle RDR gearheads allow lower-profile layouts, especially under turntables.

Pulley-input RDP models add flexibility in where the motor sits, which helps when space is tight.

Integration

Integration

Every custom part in a drive adds design and assembly time. Gear Sets Plus add a tilt-resistant output bearing, so they are ready for immediate installation. RD2 gearheads arrive sealed with grease and fit all major servo motors.

Strain Wave Gearbox Units go further, with output and drive bearings and a sealing system already on board.

Cable Routing

Cable Routing

Cables and piping often need to pass through a rotating axis inside the tool. The RV-C Series and the hollow shaft RDS-C and RDR-C models keep the accuracy and rigidity of the RV design while leaving the center open.

For compact joints, hat-type strain wave gears offer a larger hollow shaft than the cup type.

Selection Guide

Semiconductor equipment calls for precise motion in tight spaces, often in controlled environments. Work through these points for each axis before you size a gear. Your answers narrow the catalog to a short list of models to compare.
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  • Set accuracy targets per axis
    Define positioning accuracy, repeatability and settling time per axis.
    These targets guide the choice between strain wave and RV gears.
  • Size for the full duty cycle
    Include hours of operation per day and the motion profile of each axis.
    Our engineers check the expected service life for your conditions.
  • Map the space for each axis
    Note the space available for the gear, the motor and any bearings.
    Gear Sets and right-angle RDR gearheads keep axes compact and low.
  • Plan cable and piping routing
    List the cables and piping that must cross each rotating axis.
    Hollow shaft RV-C, RDS-C and RDR-C models leave the center open.
  • Define cleanroom needs early
    Share the cleanliness class and any limits on lubricants at the start.
    These requirements shape the gear, sealing and lubricant selection.

Your Partner For Semi-Conductors

Nabtesco Motion Control offers semiconductor equipment builders Strain Wave Gear Sets, RD2 gearheads and the RV-C Series. Strain wave gears add zero backlash, and RV-based gears bring high rigidity and load support.

Tell us about your tool and accuracy targets and we will help you choose the right gear.

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Our Solutions

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Strain Wave

Gear Sets

Component set and the simplest variant of the strain wave gear, with solid or hollow shaft.
Product Features:
  • Flexible integration
  • Precise and dynamic
  • Individually customizable
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RDS-C

Advanced precision reduction gearhead model (Hollow Shaft Series)
Product Features:
  • Backlash less than 1 arc.min.
  • Lost motion less than 1 arc.min.
  • Internal main bearing
  • Major motor coupling parts included
  • Sealed grease
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RDR-C

Right angle input type precision reduction gearhead model (Hollow Shaft Series)
Product Features:
  • Backlash less than 1.5 arc.min.
  • Lost motion less than 1.5 arc.min.
  • Right angle input type
  • Internal main bearing
  • Major motor coupling parts included
  • Sealed grease
Strain Wave

Gear Sets Plus

Strain wave component set with solid or hollow shaft, including the output bearing.
Product Features:
  • Ready-to-install strain wave gears
  • Incl. tilt-resistant output bearing
  • Reduced design and assembly effort
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RDS-E

Advanced precision reduction gearhead model (Solid Series)
Product Features:
  • Backlash less than 1 arc.min.
  • Lost motion less than 1 arc.min.
  • Internal main bearing
  • Major motor coupling parts included
  • Sealed grease
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RDR-E

Right angle input type precision reduction gearhead model (Solid Series)
Product Features:
  • Backlash less than 1.5 arc.min.
  • Lost motion less than 1.5 arc.min.
  • Right angle input type
  • Internal main bearing
  • Major motor coupling parts included
  • Sealed grease

How Can We Support You?

Here for engineers and robot technicians.
Designing machines, servicing robots or building mechatronic systems? Our application engineers help you select, size, integrate and maintain the right gear.
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